Low-Angle X-ray Scattering (LAXS)
It is possible to obtain information on thin film composition in real-time! A diagnostic tool for process monitoring.
"Low Angle X-ray Spectroscopy (LAXS)" is a low-angle X-ray spectroscopy method. It provides a diagnostic tool for in-situ real-time process monitoring for PLD/PED systems. It allows for real-time information on thin film composition as a complementary tool to RHEED. 【Features】 ■ It is possible to obtain real-time information on thin film composition as a complementary tool to RHEED. *For more details, please refer to the PDF document or feel free to contact us.
- Company：ハイテック・システムズ
- Price：Other
